Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
SATO Kazuo,Silicon Micromachining Technologies Applied to Micromachine Devices,Shinku,05598516,The Vacuum Society of Japan,2000,43,2,106-111,https://cir.nii.ac.jp/crid/1390001204064754304,https://doi.org/10.3131/jvsj.43.106