著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
MATSUMOTO Hironaga and ANDO Kimio and MIURA Noboru and NAKANO Ryotaro,Evaluation of Hafnium-Titanium-Oxide Thin Films Prepared by Reactivc Sputtering,真空,05598516,一般社団法人 日本真空学会,2002,45,1,18-25,https://cir.nii.ac.jp/crid/1390001204065436544,https://doi.org/10.3131/jvsj.45.18