著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Chonan Yasunori and Komiyama Takao and Onuki Jin and Nagano Takahiro and Akahoshi Haruo and Itabashi Takeyuki and Saito Tatuyuki and Khoo Khyoupin,Filling a Narrow and High Aspect-Ratio Trench with Electro-Cu Plating,MATERIALS TRANSACTIONS,13459678,公益社団法人 日本金属学会,2006,47,5,1417-1419,https://cir.nii.ac.jp/crid/1390001204251149440,https://doi.org/10.2320/matertrans.47.1417