著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Ishibashi Takeo and Ono Yoshiharu and Yamaguchi Atsumi and Ogawa Sachiko and Hanawa Tetsuro and Shinohara Masaaki and Tadokoro Masahiro and Yonekura Kazumasa and Mitani Yuko and Matsuda Keiko and Hirori Hideaki and Miyamoto Takashi and Matsunobu Takeshi,Novel Spin-on Carbon Hard Mask with Hardening by Ion Implantation,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2007,20,3,365-372,https://cir.nii.ac.jp/crid/1390001204323763968,https://doi.org/10.2494/photopolymer.20.365