著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yamashita Tsuneo and Hayami Takashi and Ishikawa Takuji and Kanemaru Takashi and Aoyama Hirokazu,Novel Low Reflective Index Fluoropolymers based Top Anti-reflective Coatings (TARC) for 193-nm Lithography,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2007,20,3,353-358,https://cir.nii.ac.jp/crid/1390001204323765888,https://doi.org/10.2494/photopolymer.20.353