著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
O'Connor Naphtali A. and Liberman Vladimir and Lei Xuegong and López-Gejo Juan and Turro Nicholas J. and Zimmerman Paul A.,Degradation of Hydrocarbon Fluids in the Immersion Lithography at 193nm,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2008,21,5,607-611,https://cir.nii.ac.jp/crid/1390001204323837312,https://doi.org/10.2494/photopolymer.21.607