著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Watanabe Takeo and Kinoshita Hiroo and Hamamoto Kazuhiro and Hada Hideo and Komano Hiroshi,Mitigation of Low Outgassing and Small Line Edge Roughness for EUVL Resist,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2004,17,3,361-366,https://cir.nii.ac.jp/crid/1390001204324032384,https://doi.org/10.2494/photopolymer.17.361