Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Taguchi Yoshihiko and Kawai Kazuki and Otsuki Akiko and Man Naoki and Mochida Kenji and Nakamura Shinichi and Kimura Tooru,Structural Changes of Photoresist on Wafer Studied by Pyrolysis-GC/MS Combined with Micro-GPC,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),2014,27,1,41-48,https://cir.nii.ac.jp/crid/1390001204324829824,https://doi.org/10.2494/photopolymer.27.41