Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Suzuki Kenta and Youn Sung-Won and Park Sang-Cheon and Hiroshima Hiroshi and Takagi Hideki,Cu/Polyimide Multilayer Interconnections Fabricated by Nanoimprint at Every Lithography Process,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),2014,27,1,73-80,https://cir.nii.ac.jp/crid/1390001204324838272,https://doi.org/10.2494/photopolymer.27.73