Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Hada Hideo and Watanabe Takeo and Kinoshita Hiroo and Komano Hiroji,Outgassing Analysis in EUV Resist,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),2005,18,4,475-480,https://cir.nii.ac.jp/crid/1390001204324860032,https://doi.org/10.2494/photopolymer.18.475