著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hada Hideo and Watanabe Takeo and Kinoshita Hiroo and Komano Hiroji,Outgassing Analysis in EUV Resist,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2005,18,4,475-480,https://cir.nii.ac.jp/crid/1390001204324860032,https://doi.org/10.2494/photopolymer.18.475