著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Meanhoudt M. and Vandenberghe G. and Ercken M. and Cheng S. and Leunissen P. and Ronse K.,Opportunities and Challenges in Immersion Lithography,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2005,18,5,571-577,https://cir.nii.ac.jp/crid/1390001204325199872,https://doi.org/10.2494/photopolymer.18.571