Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Taniguchi Kensuke and Tanaka Kunihito and Inomata Tadaaki and Kogoma Masuhiro,Photoresist Ashing by Atmospheric Pressure Glow Plasma.,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),1997,10,1,113-118,https://cir.nii.ac.jp/crid/1390001204325262080,https://doi.org/10.2494/photopolymer.10.113