著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Sato Yasuhiko and Miyoshi Seiro and Matsuyama Hideto and Onishi Yasunobu and Nakano Yoshihiko and Hayase Shuji,Polysilane Anti-Reflective Layer for Deep UV Lithography.,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,1999,12,4,663-668,https://cir.nii.ac.jp/crid/1390001204325773056,https://doi.org/10.2494/photopolymer.12.663