著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Dabbagh Gary and Hutton Richard S. and Cirelli Raymond A. and Novembre Anthony E. and Reichmanis Elsa and Nalamasu Omkaram,Capabilities and Limitations of Plasma Polymerized Methylsilane (PPMS) All-Dry Lithography.,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,1998,11,4,651-661,https://cir.nii.ac.jp/crid/1390001204325877376,https://doi.org/10.2494/photopolymer.11.651