著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Johnson D. W. and Jeffries A. and Minsek D. W. and Hurditch R. J.,"Improving the Process Capability of SU-8, Part2",Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2001,14,5,689-694,https://cir.nii.ac.jp/crid/1390001204326015232,https://doi.org/10.2494/photopolymer.14.689