SiO_2-TiO_系多孔質ガラスの湿度センサーへの応用

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タイトル別名
  • Preparation and application of SiO2-TiO2 porous glasses to humidity-sensor elements.
  • ＳｉＯ２‐ＴｉＯ２系多孔質ガラスの湿度センサーへの応用
  • SiO2 TiO2ケイ タコウシツ ガラス ノ シツド センサー エ ノ オウヨウ

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説明

SiO2-TiO2 porous glasses were prepared from SiO2-TiO2-B2O3-Na2O glasses by means of the phase-separation method. The performance as humidity-sensor elements were examined by the electric resistivity according to the relative humidity change. The porous glass containing 25 mass% of TiO2 showed good performance in the machine processing and the sensibility of humidity.<BR>The preparation at low phase-separation temperature (773K) gave the porous glasses with small diameter pores and large specific surface area. The electric resistivity extensively of them changed from 30 Ωm to 15 × 106 Ωm with relative humidity change. Leaching the porous glass element in NaOHaq. shortened the response time without changing the electric resistivity.

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