著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yildiz Fikret and Matsunaga Tadao and Haga Yoichi,Capacitive Micromachined Ultrasonic Transducer Packaging for Forward-looking Ultrasonic Endoscope using Low Temperature Co-fired Ceramic Side Via,電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）,13418939,一般社団法人 電気学会,2016,136,12,515-521,https://cir.nii.ac.jp/crid/1390001204460112640,https://doi.org/10.1541/ieejsmas.136.515