Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Oguchi Yohei and Iino Chisa and Iwase Eiji,The Design of MEMS Scanner for the Three Dimensional Actuation with a Pair of Beams,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2016,136,10,448-453,https://cir.nii.ac.jp/crid/1390001204460476032,https://doi.org/10.1541/ieejsmas.136.448