Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Esashi Masayoshi,Physical Sensors,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,1995,115,1,18-21,https://cir.nii.ac.jp/crid/1390001204460910080,https://doi.org/10.1541/ieejsmas.115.18