Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Shikida Mitsuhiro and Sato Kazuo and Koide Akira,An Electrostatic Valve that Works in Higher than Atmospheric Gas Pressure,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,1996,116,6,219-224,https://cir.nii.ac.jp/crid/1390001204461673472,https://doi.org/10.1541/ieejsmas.116.219