Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Sasaki Minoru and Endou Satoshi and Hane Kazuhiro,Compact Triangulation Sensor Realized by Bending Si Wafer with Optical Elements at Metal Hinges,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2008,128,6,271-276,https://cir.nii.ac.jp/crid/1390001204461792384,https://doi.org/10.1541/ieejsmas.128.271