Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Takenaka Hisataka and Hatayama Masatoshi and Ito Hisashi and Ohchi Tadayuki and Takano Akio and Kurosawa Satoru and Itoh Hiroshi and Ichimura Shingo,Development of Si/SiO2 Multilayer Type AFM Tip Characterizers,Journal of Surface Analysis,13411756,The Surface Analysis Society of Japan,2011,17,3,264-268,https://cir.nii.ac.jp/crid/1390001204471328128,https://doi.org/10.1384/jsa.17.264