Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
HARA Yasuhiko and HAMADA Toshimitsu and OKAMOTO Keiichi and NAKAGAWA Kiyoshi and EGUCHI Kazuhiko,Automatic Inspection of Reticle Patterns Referenced to Its Design Data,Transactions of the Society of Instrument and Control Engineers,0453-4654,The Society of Instrument and Control Engineers,1984,20,12,1135-1142,https://cir.nii.ac.jp/crid/1390001204502373760,https://doi.org/10.9746/sicetr1965.20.1135