Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kojima Toshinori and Odagiri Takashi and Matsukata Masahiko and Yamada Shigeru,Residual Hydrogen in Polycrystalline Silicon Produced from Monosilane by Fluidized-Bed CVD Method.,KAGAKU KOGAKU RONBUNSHU,0386216X,"The Society of Chemical Engineers, Japan",1992,18,5,701-707,https://cir.nii.ac.jp/crid/1390001204509460352,https://doi.org/10.1252/kakoronbunshu.18.701