Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Shojo Tadashi and Inoue Goichi and Koike Kunihiko and Takeuchi Akihiro and Iwasa Yoshio and Yasui Shinji,Development of Semiconductor Exhaust Gas Decomposition for Fluorine Recycle System,KAGAKU KOGAKU RONBUNSHU,0386-216X,"The Society of Chemical Engineers, Japan",2013,39,5,452-457,https://cir.nii.ac.jp/crid/1390001204512760320,https://doi.org/10.1252/kakoronbunshu.39.452