Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KATASHIRO Masahiro,Review of MEMS Assembly Technologies in MEMS Foundry Services,Journal of The Japan Institute of Electronics Packaging,1343-9677,The Japan Institute of Electronics Packaging,2004,7,4,294-298,https://cir.nii.ac.jp/crid/1390001204560323712,https://doi.org/10.5104/jiep.7.294