Slot Antenna Coupled Thin-Film Warm Carrier Far-Infrared Radiation Detectors

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  • Yasuoka Yoshizumi
    Dept. of Electrical and Electronic Engineering, National Defense Academy
  • Suzuki Kenji
    Dept. of Electrical and Electronic Engineering, National Defense Academy

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Other Title
  • 遠赤外光検出用スロットアンテナ結合薄膜ウォームキャリア素子
  • エンセキガイコウ ケンシュツヨウ スロットアンテナ ケツゴウ ハクマク ウォーム キャリア ソシ

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Description

Slot antenna coupled thin-film warm carrier devices were fabricated, and the detection properties were investigated at 94 and 700 GHz. Two-dimensional 8 × 3 slot antenna arrays fed by a coplanar waveguide were used as the antennas. The thin-film antennas were fabricated with a photolithographic method, and the warm carrier detectors, which have the contact area of 8 × 10-10 cm2, were fabricated with an electron beam lithographic method. The experimental results indicate that the fabricated devices receive the far-infrared radiation with antenna and rectified it with non-linear I-V characteristic. By changing the antenna from the single slot antenna to the two-dimensional 8 × 3 slot antenna array, the detected sensitivity improved by 11 dB.

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