Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
TANAKA Norio,Waste-water treatment and reuse technology for semiconductor manufacturing plant,Oyo Buturi,0369-8009,The Japan Society of Applied Physics,2000,69,3,297-300,https://cir.nii.ac.jp/crid/1390001204596872704,https://doi.org/10.11470/oubutsu1932.69.297