Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) ISHIKAWA Junzo,Negative-ion production for materials science and low charging mechanisms in negative-ion implantation,Oyo Buturi,0369-8009,The Japan Society of Applied Physics,1996,65,6,587-593,https://cir.nii.ac.jp/crid/1390001204597734912,https://doi.org/10.11470/oubutsu1932.65.587