Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Akatsuka Hiroshi,Optical Emission Spectroscopy Measurement of Processing Plasmas,IEEJ Transactions on Fundamentals and Materials,03854205,The Institute of Electrical Engineers of Japan,2010,130,10,892-898,https://cir.nii.ac.jp/crid/1390001204598897280,https://doi.org/10.1541/ieejfms.130.892