Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Fujita Hiroyuki,Micro-actuator and micromechanical parts.,IEEJ Transactions on Industry Applications,09136339,The Institute of Electrical Engineers of Japan,1988,108,3,214-217,https://cir.nii.ac.jp/crid/1390001204654474496,https://doi.org/10.1541/ieejias.108.214