Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
早馬 修 and 谷川 史郎,Chronological overview and future trends in semiconductor and manufacturing equipment industries.,Journal of the Japan Society of Precision Engineering,03743543,The Japan Society for Precision Engineering,1985,51,12,2172-2176,https://cir.nii.ac.jp/crid/1390001204731533312,https://doi.org/10.2493/jjspe1933.51.2172