Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
WAKUI Shinji,Recognition of Base-Plate Acceleration Feedback Embedded in Stage Positioning Control System.,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,1998,64,7,1017-1021,https://cir.nii.ac.jp/crid/1390001204763901952,https://doi.org/10.2493/jjspe.64.1017