Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
DOI Toshiro and HIYAMA Hirokuni and FUKUDA Akira and KUROKAWA Shuhei,Trend of Semiconductor Devices and Planarization Technology with Future Development,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2007,73,7,745-750,https://cir.nii.ac.jp/crid/1390001204796142080,https://doi.org/10.2493/jjspe.73.745