Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) 神崎 昌郎 and 鈴木 孝幸,Preparation of High Lubricious and Hard Sputtered Films with TiN+MoS2 Composite Target and Improvement of Their Adhesive Strength,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2012,78,3,241-245,https://cir.nii.ac.jp/crid/1390001204796364544,https://doi.org/10.2493/jjspe.78.241