Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) 大岩 孝彰 and 勝木 雅英,Survey of Questionnaire on Ultra-precision Positioning,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2011,77,10,912-917,https://cir.nii.ac.jp/crid/1390001204796745728,https://doi.org/10.2493/jjspe.77.912