Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
SAITOU Norio,E-beam Lithography system for pattern Generation,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2001,67,9,1393-1397,https://cir.nii.ac.jp/crid/1390001204796751232,https://doi.org/10.2493/jjspe.67.1393