Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
OZAWA Norimitsu and KOHNO Tsuguo and MITSUI Kimiyuki and MUSYA Tohru and MIYAMOTO Kozo,High Precision Optical Surface Sensor (HIPOSS-1) - Studies on ultra-precision measuring technology.,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,1986,52,12,2080-2086,https://cir.nii.ac.jp/crid/1390001204797364224,https://doi.org/10.2493/jjspe.52.2080