Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
UNEDA Michio and OKABE Kenji and MORIYA Norihiko and SHIBUYA Kazutaka and ISHIKAWA Ken-ichi,Development of Evaluation Method for Geometrical Characterization of Polishing Pad Surface Texture Based on Contact Image Analysis Using Image Rotation Prism,Journal of the Japan Society for Precision Engineering,09120289,The Japan Society for Precision Engineering,2010,76,11,1276-1282,https://cir.nii.ac.jp/crid/1390001204797967872,https://doi.org/10.2493/jjspe.76.1276