Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) 佐藤 浩之助,III. プラズマ発生法•形態,The Journal of the Institute of Electrical Engineers of Japan,00202878,The Institute of Electrical Engineers of Japan,1987,107,11,1101-1106,https://cir.nii.ac.jp/crid/1390001205140751360,https://doi.org/10.11526/ieejjournal1888.107.11_1101