著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hirai Shohdai and Niibe Masahito and Kawakami Retsuo and Shirahama Tatsuo and Nakano Yoshitaka and Mukai Takashi,Surface Analysis of AlGaN Treated with CF<sub>4 </sub>and Ar Plasma Etching,e-Journal of Surface Science and Nanotechnology,1348-0391,公益社団法人 日本表面真空学会,2015,13,0,481-487,https://cir.nii.ac.jp/crid/1390001205185770368,https://doi.org/10.1380/ejssnt.2015.481