Development of Local CVD System for Observation of Carbon Nano Tube Growth under the Scanning Electron Microscopy
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- KASUYA Keigo
- 東京大学大学院工学系研究科
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- OOI Takeshi
- 東京大学大学院工学系研究科
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- TSUCHIYA Kensuke
- 東京大学大学院工学系研究科
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- NAKAO Masayuki
- 東京大学大学院工学系研究科
Bibliographic Information
- Other Title
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- カーボンナノチューブの生成過程観察のための走査型電子顕微鏡内局所CVD装置の開発
- カーボンナノチューブ ノ セイセイ カテイ カンサツ ノ タメ ノ ソウサガタ デンシ ケンビキョウ ナイキョクショ CVD ソウチ ノ カイハツ
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Description
Carbon nano tube (CNT) with its unique structure and functions is expected to be an effective element for nano-meter scale devices. To develop more applicable synthetic method, the growth process of CNT should be revealed. Here is presented a local CVD system. The system can synthesize CNTs under the observation of scanning electron microscopy (SEM), and the CNT growth is hereby presented. The local CVD system consists of a heating system and a gas inducing system. The heating system can heat up to 1000 degrees, permitting the thermal limit of the SEM. The gas inducing system can create a 1.6torr local pressure area, also permitting the pressure limit of the SEM observation. Using this system, the growth of CNT is real-timely observed. According to Raman spectra, most of synthesized CNTs are supposed to be multi-walled carbon nano tubes. The growth of CNT looked to extend from the root. The rate of the growth is about 5nm per second.
Journal
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- Journal of the Japan Society for Precision Engineering, Contributed Papers
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Journal of the Japan Society for Precision Engineering, Contributed Papers 71 (2), 211-215, 2005
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390001205280014592
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- NII Article ID
- 110001824116
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- NII Book ID
- AA11966630
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- ISSN
- 18818722
- 13488716
- 13488724
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- NDL BIB ID
- 7243793
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed