著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
SHIMADA Shiro and FUJI Yusuke and KIYONO Hajime and TSUJINO Jiro and YAMAZAKI Isao,Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD,Journal of the Ceramic Society of Japan,18820743,公益社団法人 日本セラミックス協会,2009,117,1364,415-420,https://cir.nii.ac.jp/crid/1390001205283127808,https://doi.org/10.2109/jcersj2.117.415