Solid Electrochemical Micromachining Using a Tungsten Microelectrode Coated with a Polymer Electrolyte

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  • KAMADA Kai
  • TOKUTOMI Masaaki
    Department of Applied Chemistry, Faculty of Engineering, Kyushu University
  • INADA Miki
    Department of Applied Chemistry, Faculty of Engineering, Kyushu University
  • ENOMOTO Naoya
    Department of Applied Chemistry, Faculty of Engineering, Kyushu University
  • HOJO Junichi
    Department of Applied Chemistry, Faculty of Engineering, Kyushu University

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説明

Electrochemical micromachining of a metal plate was performed using a solid polymer electrolyte. The fundamental electrolysis system was composed of a metal plate (anode)|polymer electrolyte|tungsten needle (cathode), where the contact diameter of the metal|polymer interface was extremely small (a few μm). The metal substrate was electrochemically oxidized and then Mn+ ions migrated to the polymer electrolyte. As a result of the continuous application of a dc voltage to the cell, finer-resolution micromachining (~10 μm) was achieved under room-temperature operation as compared with our previous results obtained using a Na-β"-Al2O3 solid electrolyte. Furthermore, the present technique was applicable to many different kinds of metal substrates.<br>

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