Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) SUGIMOTO Toshiki and OKANO Tatsuo and FUKUTANI Katsuyuki,Problem of Gas Dose with Micro-Capillary Array,Journal of the Vacuum Society of Japan,18822398,The Vacuum Society of Japan,2009,52,3,141-144,https://cir.nii.ac.jp/crid/1390001205295140352,https://doi.org/10.3131/jvsj2.52.141