Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
MOTOMURA Taisei and TAKAHASHI Kazunori and KASASHIMA Yuji and Kikunaga Kazuya and UESUGI Fumihiko and ANDO Akira,Evaluation of SF<sub>6</sub> Reactive Ion Etching Performance with a Permanent Magnet Located behind the Substrate based on a Simple Design Concept,Journal of the Vacuum Society of Japan,18822398,The Vacuum Society of Japan,2016,59,1,11-15,https://cir.nii.ac.jp/crid/1390001205295999872,https://doi.org/10.3131/jvsj2.59.11