{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390001205647790848.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.11522/pscjspe.2002a.0.163.0"}},{"identifier":{"@type":"NAID","@value":"130007001948"}}],"dc:title":[{"@language":"en","@value":"Study on Polishing Mechanism of Silicon Carbide Semiconductor Based on the Evaluation of Polished Surface"},{"@language":"ja","@value":"加工表面の分析評価に基づいたSiC半導体の加工メカニズムの研究"}],"description":[{"type":"abstract","notation":[{"@language":"ja","@value":"SiCのSi終端面の研磨能率,結晶構造の安定性,加工面の平滑性の向上を目的として超精密ポリシング技術の研究を行っている.これまでに酸化クロム砥石,砥粒を中心としたポリシングを行い,その表面のFT-IR,XPSによる分析·評価から研磨のメカニズムを推定した.また新たに酸化チタン光触媒による研磨法の検討も行った."}],"abstractLicenseFlag":"disallow"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1410009221724250498","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000391989159"}],"foaf:name":[{"@language":"en","@value":"Watanabe Junji"},{"@language":"ja","@value":"渡邉 純二"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Kumamoto University"},{"@language":"ja","@value":"熊本大学　工学部　知能生産システム工学科"}]},{"@id":"https://cir.nii.ac.jp/crid/1410009221724250497","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000391989160"}],"foaf:name":[{"@language":"en","@value":"Fujimoto Makoto"},{"@language":"ja","@value":"藤本 誠"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"熊本大学　大学院自然科学研究科"},{"@language":"en","@value":"Kumamoto University"}]},{"@id":"https://cir.nii.ac.jp/crid/1030003658315996419","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"40005963"},{"@type":"NRID","@value":"1000040005963"},{"@type":"NRID","@value":"9000408619995"},{"@type":"NRID","@value":"9000408619571"},{"@type":"NRID","@value":"9000244908594"},{"@type":"NRID","@value":"9000244908824"},{"@type":"NRID","@value":"9000254547806"},{"@type":"NRID","@value":"9000401830368"},{"@type":"NRID","@value":"9000401953196"},{"@type":"NRID","@value":"9000401882623"},{"@type":"NRID","@value":"9000408619990"},{"@type":"NRID","@value":"9000024967884"},{"@type":"NRID","@value":"9000408619620"},{"@type":"NRID","@value":"9000408624677"},{"@type":"NRID","@value":"9000254127364"},{"@type":"NRID","@value":"9000254139235"},{"@type":"NRID","@value":"9000401826818"},{"@type":"NRID","@value":"9000401860850"},{"@type":"NRID","@value":"9000401912656"},{"@type":"NRID","@value":"9000256366443"},{"@type":"NRID","@value":"9000003271073"},{"@type":"NRID","@value":"9000020085898"},{"@type":"NRID","@value":"9000254558200"},{"@type":"NRID","@value":"9000256110651"},{"@type":"NRID","@value":"9000003419797"},{"@type":"NRID","@value":"9000256109619"},{"@type":"NRID","@value":"9000401828820"},{"@type":"NRID","@value":"9000401898918"},{"@type":"NRID","@value":"9000003272246"},{"@type":"NRID","@value":"9000398565191"},{"@type":"NRID","@value":"9000408619560"},{"@type":"NRID","@value":"9000244908077"},{"@type":"NRID","@value":"9000242838362"},{"@type":"NRID","@value":"9000401904156"},{"@type":"NRID","@value":"9000408620037"},{"@type":"NRID","@value":"9000408619625"},{"@type":"NRID","@value":"9000408619633"},{"@type":"NRID","@value":"9000408619611"},{"@type":"NRID","@value":"9000025108650"},{"@type":"NRID","@value":"9000401842674"},{"@type":"NRID","@value":"9000401857371"},{"@type":"NRID","@value":"9000401855791"},{"@type":"NRID","@value":"9000401879002"},{"@type":"NRID","@value":"9000258192532"},{"@type":"NRID","@value":"9000408619964"},{"@type":"NRID","@value":"9000408619619"},{"@type":"NRID","@value":"9000408619576"},{"@type":"NRID","@value":"9000401946416"},{"@type":"NRID","@value":"9000401946056"},{"@type":"NRID","@value":"9000401847811"},{"@type":"NRID","@value":"9000258163923"},{"@type":"NRID","@value":"9000005676408"},{"@type":"NRID","@value":"9000408619975"},{"@type":"NRID","@value":"9000408620041"},{"@type":"NRID","@value":"9000408619584"},{"@type":"NRID","@value":"9000408619566"},{"@type":"NRID","@value":"9000020754675"},{"@type":"NRID","@value":"9000242838579"},{"@type":"NRID","@value":"9000254124497"},{"@type":"NRID","@value":"9000401890236"},{"@type":"NRID","@value":"9000408619925"},{"@type":"NRID","@value":"9000244908610"},{"@type":"NRID","@value":"9000345325966"},{"@type":"NRID","@value":"9000401828176"},{"@type":"NRID","@value":"9000401834512"},{"@type":"NRID","@value":"9000017944199"},{"@type":"NRID","@value":"9000408619605"},{"@type":"NRID","@value":"9000408609736"},{"@type":"NRID","@value":"9000254123708"},{"@type":"NRID","@value":"9000401864315"},{"@type":"NRID","@value":"9000401867085"},{"@type":"NRID","@value":"9000107391683"},{"@type":"NRID","@value":"9000006939939"},{"@type":"NRID","@value":"9000408619957"},{"@type":"NRID","@value":"9000408619644"},{"@type":"NRID","@value":"9000408619557"},{"@type":"NRID","@value":"9000408619967"},{"@type":"NRID","@value":"9000254546506"},{"@type":"NRID","@value":"9000253325786"},{"@type":"NRID","@value":"9000254134729"},{"@type":"NRID","@value":"9000398566389"},{"@type":"NRID","@value":"9000254562967"},{"@type":"NRID","@value":"9000254133756"},{"@type":"NRID","@value":"9000401853720"},{"@type":"NRID","@value":"9000401848871"},{"@type":"NRID","@value":"9000401911007"},{"@type":"NRID","@value":"9000255810758"},{"@type":"NRID","@value":"9000408619549"},{"@type":"NRID","@value":"9000408619631"},{"@type":"NRID","@value":"9000408619578"},{"@type":"NRID","@value":"9000254562196"},{"@type":"NRID","@value":"9000254557841"},{"@type":"NRID","@value":"9000254127341"},{"@type":"NRID","@value":"9000401669353"},{"@type":"NRID","@value":"9000408619599"},{"@type":"NRID","@value":"9000408619551"},{"@type":"NRID","@value":"9000244888944"},{"@type":"NRID","@value":"9000283740968"},{"@type":"NRID","@value":"9000254566270"},{"@type":"NRID","@value":"9000401849537"},{"@type":"NRID","@value":"9000401721834"},{"@type":"NRID","@value":"9000391989161"},{"@type":"NRID","@value":"9000003388668"},{"@type":"NRID","@value":"9000003283409"},{"@type":"NRID","@value":"9000408619946"},{"@type":"NRID","@value":"9000346929695"},{"@type":"NRID","@value":"9000254130958"},{"@type":"NRID","@value":"9000254139748"},{"@type":"NRID","@value":"9000258134763"},{"@type":"NRID","@value":"9000024986500"},{"@type":"NRID","@value":"9000025117704"},{"@type":"NRID","@value":"9000408619956"},{"@type":"NRID","@value":"9000408619568"},{"@type":"NRID","@value":"9000408619590"},{"@type":"NRID","@value":"9000408619587"},{"@type":"NRID","@value":"9000408619624"},{"@type":"NRID","@value":"9000408619604"},{"@type":"NRID","@value":"9000401834494"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0068855"}],"foaf:name":[{"@language":"en","@value":"Kuroda Noritaka"},{"@language":"ja","@value":"黒田 規敬"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Kumamoto University"},{"@language":"ja","@value":"熊本大学　工学部　知能生産システム工学科"}]},{"@id":"https://cir.nii.ac.jp/crid/1420282801204722688","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"10223679"},{"@type":"NRID","@value":"1000010223679"},{"@type":"NRID","@value":"9000408422229"},{"@type":"NRID","@value":"9000342795982"},{"@type":"NRID","@value":"9000406357014"},{"@type":"NRID","@value":"9000392732665"},{"@type":"NRID","@value":"9000252924760"},{"@type":"NRID","@value":"9000392697662"},{"@type":"NRID","@value":"9000253326444"},{"@type":"NRID","@value":"9000402033273"},{"@type":"NRID","@value":"9000401717495"},{"@type":"NRID","@value":"9000399329610"},{"@type":"NRID","@value":"9000107378118"},{"@type":"NRID","@value":"9000283816175"},{"@type":"NRID","@value":"9000253691613"},{"@type":"NRID","@value":"9000401632779"},{"@type":"NRID","@value":"9000283228114"},{"@type":"NRID","@value":"9000309985203"},{"@type":"NRID","@value":"9000252960789"},{"@type":"NRID","@value":"9000402030345"},{"@type":"NRID","@value":"9000398140672"},{"@type":"NRID","@value":"9000309985065"},{"@type":"NRID","@value":"9000402020539"},{"@type":"NRID","@value":"9000344807376"},{"@type":"NRID","@value":"9000383166090"},{"@type":"NRID","@value":"9000258168316"},{"@type":"NRID","@value":"9000399329511"},{"@type":"NRID","@value":"9000346916068"},{"@type":"NRID","@value":"9000021331716"},{"@type":"NRID","@value":"9000309986652"},{"@type":"NRID","@value":"9000406376511"},{"@type":"NRID","@value":"9000391989162"},{"@type":"NRID","@value":"9000283812347"},{"@type":"NRID","@value":"9000009891812"},{"@type":"NRID","@value":"9000347177714"},{"@type":"NRID","@value":"9000257982792"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0100914"}],"foaf:name":[{"@language":"en","@value":"Eryu Osamu"},{"@language":"ja","@value":"江龍 修"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Nagoya Institute of Technology"},{"@language":"ja","@value":"名古屋工業大学　電気情報工学科"}]}],"publication":{"prism:publicationName":[{"@language":"en","@value":"Proceedings of JSPE Semestrial Meeting"},{"@language":"ja","@value":"精密工学会学術講演会講演論文集"},{"@language":"en","@value":"Proceedings of JSPE Semestrial Meeting"},{"@language":"ja","@value":"精密工学会学術講演会講演論文集"}],"dc:publisher":[{"@language":"en","@value":"The Japan Society for Precision Engineering"},{"@language":"ja","@value":"公益社団法人 精密工学会"}],"prism:publicationDate":"2002","prism:volume":"2002A","prism:number":"0","prism:startingPage":"163","prism:endingPage":"163"},"availableAt":"2002","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=Silicon%20Carbide","dc:title":"Silicon Carbide"},{"@id":"https://cir.nii.ac.jp/all?q=Mechanochemical%20Polishing","dc:title":"Mechanochemical Polishing"},{"@id":"https://cir.nii.ac.jp/all?q=Chromium%20Oxide","dc:title":"Chromium Oxide"},{"@id":"https://cir.nii.ac.jp/all?q=Titanium%20Oxide%20Photocatalyst","dc:title":"Titanium Oxide Photocatalyst"},{"@id":"https://cir.nii.ac.jp/all?q=Fourier%20Transform%20Infrared%20Spectroscopy","dc:title":"Fourier Transform Infrared Spectroscopy"},{"@id":"https://cir.nii.ac.jp/all?q=X-ray%20Photoelectron%20Spectroscopy","dc:title":"X-ray Photoelectron Spectroscopy"},{"@id":"https://cir.nii.ac.jp/all?q=%E7%82%AD%E5%8C%96%E3%82%B1%E3%82%A4%E7%B4%A0","dc:title":"炭化ケイ素"},{"@id":"https://cir.nii.ac.jp/all?q=%E3%83%A1%E3%82%AB%E3%83%8E%E3%82%B1%E3%83%9F%E3%82%AB%E3%83%AB%E3%83%9D%E3%83%AA%E3%82%B7%E3%83%B3%E3%82%B0","dc:title":"メカノケミカルポリシング"},{"@id":"https://cir.nii.ac.jp/all?q=%E9%85%B8%E5%8C%96%E3%82%AF%E3%83%AD%E3%83%A0","dc:title":"酸化クロム"},{"@id":"https://cir.nii.ac.jp/all?q=%E9%85%B8%E5%8C%96%E3%83%81%E3%82%BF%E3%83%B3%E5%85%89%E8%A7%A6%E5%AA%92","dc:title":"酸化チタン光触媒"},{"@id":"https://cir.nii.ac.jp/all?q=%E3%83%95%E3%83%BC%E3%83%AA%E3%82%A8%E5%A4%89%E6%8F%9B%E8%B5%A4%E5%A4%96%E5%88%86%E5%85%89%E6%B3%95","dc:title":"フーリエ変換赤外分光法"},{"@id":"https://cir.nii.ac.jp/all?q=X%E7%B7%9A%E5%85%89%E9%9B%BB%E5%AD%90%E5%88%86%E5%85%89%E6%B3%95","dc:title":"X線光電子分光法"}],"dataSourceIdentifier":[{"@type":"JALC","@value":"oai:japanlinkcenter.org:1003439736"},{"@type":"CIA","@value":"130007001948"}]}