Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Nakajima Ryusuke and Miyoshi Takashi and Takaya Yasuhiro,Studey on Defect Detection in Thin Film Layer of SOI Wafer by Using Infrared Evanescent Light (1st Report) - FDTD Analysis of Infrared Evanescent Field on SOI Layer -,Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2003,2003A,0,447-447,https://cir.nii.ac.jp/crid/1390001205647833344,https://doi.org/10.11522/pscjspe.2003a.0.447.0