{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390001205651897344.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.11522/pscjspe.2006a.0.585.0"}},{"identifier":{"@type":"NAID","@value":"130004658236"}}],"resourceType":"学術雑誌論文(journal article)","dc:title":[{"@language":"en","@value":"Development of High Performance EUV Light Source by Laser Produced Plasma"},{"@language":"ja","@value":"高性能レーザプラズマEUV(Extreme-ultraviolet）光源の開発"}],"dcterms:alternative":[{"@language":"ja","@value":"ターゲット構造とEUV変換効率の評価"}],"description":[{"type":"abstract","notation":[{"@language":"en","@value":"To create a future system of extreme-ultraviolet (EUV) lithography, an innovative light source with 13.5nm wavelength is demanded very high power and long operation life at high repetition rate. Tin target has significant potential for high conversion efficiency (CE). We have proposed a new method to develop high performance EUV light source by using the tin target with cone shape. We investigate the EUV emission from high density plasma produced by focused laser to Sn targets, using a photo diode sensor with Mo/Si filter. We measure the angular distribution of EUV emission and evaluate the CE for our proposed tin targets with conical hole."},{"@language":"ja","@value":"EUVリソグラフィ用の波長13.5nmの光源は、高輝度と高繰返しで長寿命が要求されている。錫(Sn)は高い変換効率を持つ実用性の高いターゲットである。高性能なEUV光源として錫の円錐孔を用いたターゲット構造を提案した。本ターゲットにレーザを集光照射すると、円錐面からのアブレーションにより高密度なプラズマが生成され、EUVを放射する。Mo/Si 多層膜付フォトダイオードで角度分布を計測し、錫の円錐孔ターゲットの変換効率を評価した。"}],"abstractLicenseFlag":"disallow"}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1030003658313785602","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"40164256"},{"@type":"NRID","@value":"1000040164256"},{"@type":"NRID","@value":"9000005907364"},{"@type":"NRID","@value":"9000007997408"},{"@type":"NRID","@value":"9000020493353"},{"@type":"NRID","@value":"9000020434672"},{"@type":"NRID","@value":"9000238865416"},{"@type":"NRID","@value":"9000283818605"},{"@type":"NRID","@value":"9000258656015"},{"@type":"NRID","@value":"9000242841679"},{"@type":"NRID","@value":"9000238864375"},{"@type":"NRID","@value":"9000002034260"},{"@type":"NRID","@value":"9000021128643"},{"@type":"NRID","@value":"9000238864830"},{"@type":"NRID","@value":"9000401711992"},{"@type":"NRID","@value":"9000392802764"},{"@type":"NRID","@value":"9000004561425"},{"@type":"NRID","@value":"9000004563429"},{"@type":"NRID","@value":"9000020064252"},{"@type":"NRID","@value":"9000254141297"},{"@type":"NRID","@value":"9000253247947"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0014010"}],"foaf:name":[{"@language":"en","@value":"Nakano Motohiro"},{"@language":"ja","@value":"中野 元博"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Dept. of Prec. Sci. & Technol. and Appl. Phys., Grad. School of Eng., Osaka University"},{"@language":"ja","@value":"大阪大学  大学院工学研究科精密科学・応用物理学専攻"}]},{"@id":"https://cir.nii.ac.jp/crid/1410572171678523136","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000258646812"}],"foaf:name":[{"@language":"en","@value":"Yoshikawa Takaya"},{"@language":"ja","@value":"吉川 隆弥"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Dept. of Prec. Sci. & Technol. and Appl. Phys., Grad. School of Eng., Osaka University"},{"@language":"ja","@value":"大阪大学  大学院工学研究科精密科学・応用物理学専攻"}]},{"@id":"https://cir.nii.ac.jp/crid/1410572171678523138","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000258646813"}],"foaf:name":[{"@language":"en","@value":"Otani Yuko"},{"@language":"ja","@value":"大谷 祐子"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Dept. of Prec. Sci. & Technol. and Appl. Phys., Grad. School of Eng., Osaka University"},{"@language":"ja","@value":"大阪大学  大学院工学研究科精密科学・応用物理学専攻"}]},{"@id":"https://cir.nii.ac.jp/crid/1030003658313785601","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"50029328"},{"@type":"NRID","@value":"1000050029328"},{"@type":"NRID","@value":"9000020675512"},{"@type":"NRID","@value":"9000003396521"},{"@type":"NRID","@value":"9000392682490"},{"@type":"NRID","@value":"9000252970616"},{"@type":"NRID","@value":"9000252945769"},{"@type":"NRID","@value":"9000401615698"},{"@type":"NRID","@value":"9000258639368"},{"@type":"NRID","@value":"9000392705411"},{"@type":"NRID","@value":"9000283807787"},{"@type":"NRID","@value":"9000258641381"},{"@type":"NRID","@value":"9000258653033"},{"@type":"NRID","@value":"9000242847654"},{"@type":"NRID","@value":"9000258635932"},{"@type":"NRID","@value":"9000364864877"},{"@type":"NRID","@value":"9000238900216"},{"@type":"NRID","@value":"9000238864368"},{"@type":"NRID","@value":"9000246831319"},{"@type":"NRID","@value":"9000247079746"},{"@type":"NRID","@value":"9000016323315"},{"@type":"NRID","@value":"9000002295053"},{"@type":"NRID","@value":"9000003516655"},{"@type":"NRID","@value":"9000242847516"},{"@type":"NRID","@value":"9000283815418"},{"@type":"NRID","@value":"9000283810919"},{"@type":"NRID","@value":"9000258638462"},{"@type":"NRID","@value":"9000283810937"},{"@type":"NRID","@value":"9000391990993"},{"@type":"NRID","@value":"9000258640970"},{"@type":"NRID","@value":"9000258649586"},{"@type":"NRID","@value":"9000258649464"},{"@type":"NRID","@value":"9000246816879"},{"@type":"NRID","@value":"9000283808009"},{"@type":"NRID","@value":"9000391990572"},{"@type":"NRID","@value":"9000391989182"},{"@type":"NRID","@value":"9000258641366"},{"@type":"NRID","@value":"9000020722033"},{"@type":"NRID","@value":"9000283816514"},{"@type":"NRID","@value":"9000283818608"},{"@type":"NRID","@value":"9000252945076"},{"@type":"NRID","@value":"9000401585304"},{"@type":"NRID","@value":"9000392677161"},{"@type":"NRID","@value":"9000238870215"},{"@type":"NRID","@value":"9000238864376"},{"@type":"NRID","@value":"9000019982027"},{"@type":"NRID","@value":"9000242854973"},{"@type":"NRID","@value":"9000401583854"},{"@type":"NRID","@value":"9000258641387"},{"@type":"NRID","@value":"9000258650116"},{"@type":"NRID","@value":"9000258646814"},{"@type":"NRID","@value":"9000238858094"},{"@type":"NRID","@value":"9000247079751"},{"@type":"NRID","@value":"9000283807820"},{"@type":"NRID","@value":"9000258650403"},{"@type":"NRID","@value":"9000283813857"},{"@type":"NRID","@value":"9000283812942"},{"@type":"NRID","@value":"9000283805081"},{"@type":"NRID","@value":"9000252901665"},{"@type":"NRID","@value":"9000392706301"},{"@type":"NRID","@value":"9000255727979"},{"@type":"NRID","@value":"9000283813527"},{"@type":"NRID","@value":"9000283807813"},{"@type":"NRID","@value":"9000283818345"},{"@type":"NRID","@value":"9000253247489"},{"@type":"NRID","@value":"9000401611417"},{"@type":"NRID","@value":"9000258642140"},{"@type":"NRID","@value":"9000005527840"},{"@type":"NRID","@value":"9000258641338"},{"@type":"NRID","@value":"9000258636278"},{"@type":"NRID","@value":"9000391991029"},{"@type":"NRID","@value":"9000258650869"},{"@type":"NRID","@value":"9000258641348"},{"@type":"NRID","@value":"9000258646586"},{"@type":"NRID","@value":"9000020743339"},{"@type":"NRID","@value":"9000238874039"},{"@type":"NRID","@value":"9000283812936"},{"@type":"NRID","@value":"9000252969236"},{"@type":"NRID","@value":"9000401667864"},{"@type":"NRID","@value":"9000258639113"},{"@type":"NRID","@value":"9000258637279"},{"@type":"NRID","@value":"9000283815425"},{"@type":"NRID","@value":"9000283814437"},{"@type":"NRID","@value":"9000253247948"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read0014006"}],"foaf:name":[{"@language":"en","@value":"Kataoka Toshihiko"},{"@language":"ja","@value":"片岡 俊彦"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Dept. of Prec. Sci. & Technol. and Appl. Phys., Grad. School of Eng., Osaka University"},{"@language":"ja","@value":"大阪大学  大学院工学研究科精密科学・応用物理学専攻"}]},{"@id":"https://cir.nii.ac.jp/crid/1410572171678523137","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000258646815"}],"foaf:name":[{"@language":"en","@value":"Inoue Haruyuki"},{"@language":"ja","@value":"井上 晴行"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Dept. of Prec. Sci. & Technol. and Appl. Phys., Grad. School of Eng., Osaka University"},{"@language":"ja","@value":"大阪大学  大学院工学研究科精密科学・応用物理学専攻"}]},{"@id":"https://cir.nii.ac.jp/crid/1420845751150350976","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"40263206"},{"@type":"NRID","@value":"1000040263206"},{"@type":"NRID","@value":"9000247076336"},{"@type":"NRID","@value":"9000281374642"},{"@type":"NRID","@value":"9000258651566"},{"@type":"NRID","@value":"9000283815423"},{"@type":"NRID","@value":"9000002295050"},{"@type":"NRID","@value":"9000283810916"},{"@type":"NRID","@value":"9000003389606"},{"@type":"NRID","@value":"9000283816513"},{"@type":"NRID","@value":"9000258650110"},{"@type":"NRID","@value":"9000413777482"},{"@type":"NRID","@value":"9000258650400"},{"@type":"NRID","@value":"9000019015268"},{"@type":"NRID","@value":"9000005584731"},{"@type":"NRID","@value":"9000401667868"},{"@type":"NRID","@value":"9000241447116"},{"@type":"NRID","@value":"9000345296146"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/Yasushi_Oshikane_QMI"}],"foaf:name":[{"@language":"en","@value":"Oshikane Yasushi"},{"@language":"ja","@value":"押鐘 寧"}],"jpcoar:affiliationName":[{"@language":"en","@value":"Dept. of Prec. Sci. & Technol. and Appl. Phys., Grad. School of Eng., Osaka University"},{"@language":"ja","@value":"大阪大学  大学院工学研究科精密科学・応用物理学専攻"}]}],"publication":{"prism:publicationName":[{"@language":"en","@value":"Proceedings of JSPE Semestrial Meeting"},{"@language":"ja","@value":"精密工学会学術講演会講演論文集"},{"@language":"en","@value":"Proceedings of JSPE Semestrial Meeting"},{"@language":"ja","@value":"精密工学会学術講演会講演論文集"}],"dc:publisher":[{"@language":"en","@value":"The Japan Society for Precision Engineering"},{"@language":"ja","@value":"公益社団法人 精密工学会"}],"prism:publicationDate":"2006","prism:volume":"2006A","prism:number":"0","prism:startingPage":"585","prism:endingPage":"586"},"availableAt":"2006","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=Optical%20Measurement","dc:title":"Optical Measurement"},{"@id":"https://cir.nii.ac.jp/all?q=Laser","dc:title":"Laser"},{"@id":"https://cir.nii.ac.jp/all?q=Plasma","dc:title":"Plasma"},{"@id":"https://cir.nii.ac.jp/all?q=Extreme-ultraviolet","dc:title":"Extreme-ultraviolet"},{"@id":"https://cir.nii.ac.jp/all?q=Ablation","dc:title":"Ablation"},{"@id":"https://cir.nii.ac.jp/all?q=%E5%85%89%E8%A8%88%E6%B8%AC","dc:title":"光計測"},{"@id":"https://cir.nii.ac.jp/all?q=%E3%83%AC%E3%83%BC%E3%82%B6","dc:title":"レーザ"},{"@id":"https://cir.nii.ac.jp/all?q=%E3%83%97%E3%83%A9%E3%82%BA%E3%83%9E","dc:title":"プラズマ"},{"@id":"https://cir.nii.ac.jp/all?q=%E6%A5%B5%E7%AB%AF%E7%B4%AB%E5%A4%96%E5%85%89","dc:title":"極端紫外光"},{"@id":"https://cir.nii.ac.jp/all?q=%E3%82%A2%E3%83%96%E3%83%AC%E3%83%BC%E3%82%B7%E3%83%A7%E3%83%B3","dc:title":"アブレーション"}],"project":[{"@id":"https://cir.nii.ac.jp/crid/1040000781933599872","@type":"Project","projectIdentifier":[{"@type":"KAKEN","@value":"17360161"},{"@type":"JGN","@value":"JP17360161"},{"@type":"URI","@value":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360161/"}],"notation":[{"@language":"ja","@value":"ナノ秒レーザー誘起円錐プラズマの中心軸集束放電を用いた高輝度極端紫外光源の開発"},{"@language":"en","@value":"Development of High Performance EUV Light Source Using Condensed Cone-center-axis Plasma Generated by Laser with Nano-second Pulse-power"}]}],"dataSourceIdentifier":[{"@type":"JALC","@value":"oai:japanlinkcenter.org:1003444407"},{"@type":"CIA","@value":"130004658236"},{"@type":"KAKEN","@value":"PRODUCT-18944770"}]}