Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kimura Teruhiko and Harada Tetsuo and Watanabe Takeo and Kinoshita Hiroo,"Consideration of image reconstructing algorithm for EUV mask inspection, based on the X-ray diffraction imageing method",Proceedings of JSPE Semestrial Meeting,,The Japan Society for Precision Engineering,2010,2010A,0,429-430,https://cir.nii.ac.jp/crid/1390001205653288064,https://doi.org/10.11522/pscjspe.2010a.0.429.0